Publication:
The role of atomic oxygen in the decomposition of self-assembled monolayers during area-selective atomic layer deposition
| dc.contributor.author | O'Connor, R. | |
| dc.contributor.author | Selvaraju, V. | |
| dc.contributor.author | Hughes, G. | |
| dc.contributor.author | Bogan, J. | |
| dc.contributor.author | Brady-Boyd, Anita | |
| dc.contributor.author | Armini, Silvia | |
| dc.contributor.author | Pasquali, Mattia | |
| dc.contributor.imecauthor | Brady-Boyd, Anita | |
| dc.contributor.imecauthor | Armini, Silvia | |
| dc.contributor.imecauthor | Pasquali, Mattia | |
| dc.contributor.orcidimec | Brady-Boyd, Anita::0000-0002-9257-6837 | |
| dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
| dc.contributor.orcidimec | Pasquali, Mattia::0000-0002-1309-1082 | |
| dc.date.accessioned | 2022-05-05T14:00:39Z | |
| dc.date.available | 2022-04-28T02:12:48Z | |
| dc.date.available | 2022-05-05T14:00:39Z | |
| dc.date.issued | 2022 | |
| dc.description.wosFundingText | The authors would like to gratefully acknowledge that this project has received funding from the European Union's Horizon 2020 research and innovation programme under the Marie Sklodowska-Curie grant agreement No. 888163. The authors would also like to gratefully acknowledge financial support from the Science Foundation Ireland Principal Investigator programme under Grant No. 13/IA/1955. This work was carried out within the IMEC Industrial Affiliation Programme on Advanced Interconnects (IIAP). | |
| dc.identifier.doi | 10.1016/j.apsusc.2022.152679 | |
| dc.identifier.issn | 0169-4332 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39693 | |
| dc.publisher | ELSEVIER | |
| dc.source.beginpage | 152679 | |
| dc.source.issue | na | |
| dc.source.journal | APPLIED SURFACE SCIENCE | |
| dc.source.numberofpages | 9 | |
| dc.source.volume | 586 | |
| dc.subject.keywords | X-RAY PHOTOELECTRON | |
| dc.subject.keywords | METAL | |
| dc.subject.keywords | SURFACES | |
| dc.subject.keywords | PLASMA | |
| dc.subject.keywords | OXIDATION | |
| dc.subject.keywords | GROWTH | |
| dc.subject.keywords | COPPER | |
| dc.subject.keywords | FILMS | |
| dc.subject.keywords | OCTADECYLTRIMETHOXYSILANE | |
| dc.subject.keywords | MECHANISM | |
| dc.title | The role of atomic oxygen in the decomposition of self-assembled monolayers during area-selective atomic layer deposition | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |