Publication:

High-k dielectrics for future generation memory devices

Date

2009
Journal article
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Author(s)

Kittl, Jorge
;
Opsomer, Karl  
;
Popovici, Mihaela Ioana  
;
Menou, Nicolas
;
Kaczer, Ben  
;
Wang, Xin Peng
;
Adelmann, Christoph  
;
Pawlak, Malgorzata
;
Tomida, Kazuyuki  
;
Rothschild, Aude
;
Govoreanu, Bogdan  
;
Degraeve, Robin  
;
Schaekers, Marc  
;
Zahid, Mohammed
;
Delabie, Annelies  
;
Meersschaut, Johan  
;
Polspoel, Wouter
;
Clima, Sergiu  
;
Pourtois, Geoffrey  
;
Knaepen, W.
;
Detavernier, C.
;
Afanasiev, Valeri  
;
Blomberg, T.
;
Pierreux, Dieter  
;
Swerts, Johan  
;
Fischer, Pamela
;
Maes, Jan  
;
Manger, Dirk
;
Vandervorst, Wilfried  
;
Conard, Thierry  
;
Franquet, Alexis  
;
Favia, Paola  
;
Bender, Hugo  
;
Brijs, Bert
;
Van Elshocht, Sven  
;
Jurczak, Gosia  
;
Van Houdt, Jan  
;
Wouters, Dirk

Journal

Microelectronic Engineering

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1964 since deposited on 2021-10-17
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1964 since deposited on 2021-10-17
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Acq. date: 2026-01-11

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