Publication:
Influence of TiN microstructure on its dry etch behavior
Date
| dc.contributor.author | Dictus, Dries | |
| dc.contributor.imecauthor | Dictus, Dries | |
| dc.contributor.orcidimec | Dictus, Dries::0000-0002-7896-1747 | |
| dc.date.accessioned | 2021-10-16T15:50:51Z | |
| dc.date.available | 2021-10-16T15:50:51Z | |
| dc.date.issued | 2007-03 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12072 | |
| dc.source.conference | Materials for Advanced Metallization - MAM | |
| dc.source.conferencedate | 4/03/2007 | |
| dc.source.conferencelocation | Brugge Belgium | |
| dc.title | Influence of TiN microstructure on its dry etch behavior | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |