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Deposition of Poly-SiGe with RTCVD
Publication:
Deposition of Poly-SiGe with RTCVD
Date
2005-10
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Shi, Xiaoping
;
Schaekers, Marc
;
Brus, Stephan
;
Zhao, Chao
;
Brijs, Bert
;
Yu, HongYu
;
Kottantharayil, Anil
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1930
since deposited on 2021-10-16
Acq. date: 2025-10-22
Citations
Metrics
Views
1930
since deposited on 2021-10-16
Acq. date: 2025-10-22
Citations