Publication:

Atomic layer deposition of GdAlOx and GdHfOx using Gd(iPr-Cp)3

Date

2009
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorPierreux, Dieter
dc.contributor.authorSwerts, Johan
dc.contributor.authorKesters, Jurgen
dc.contributor.authorRichard, Olivier
dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorTielens, Hilde
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorSchaekers, Marc
dc.contributor.authorVan Elshocht, Sven
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorPierreux, Dieter
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorTielens, Hilde
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-17T21:17:09Z
dc.date.available2021-10-17T21:17:09Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14869
dc.source.beginpage2035
dc.source.conference216th ECS Meeting
dc.source.conferencedate4/10/2009
dc.source.conferencelocationVienna Austria
dc.title

Atomic layer deposition of GdAlOx and GdHfOx using Gd(iPr-Cp)3

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
18998.pdf
Size:
177.32 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions