Publication:
The use of convergent beam electron diffraction for stress measurements in shallow trench isolation structures
Date
| dc.contributor.author | Stuer, Cindy | |
| dc.contributor.author | Van Landuyt, J. | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Rooyackers, Rita | |
| dc.contributor.author | Badenes, Gonçal | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-14T13:52:17Z | |
| dc.date.available | 2021-10-14T13:52:17Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4780 | |
| dc.source.conference | International Conference on Electronic Materials & European Materials Research Society Spring Meeting. Symposium M: Advanced Cha | |
| dc.source.conferencelocation | ||
| dc.title | The use of convergent beam electron diffraction for stress measurements in shallow trench isolation structures | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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