Publication:
Mechanisms for plasma cryogenic etching of porous materials
Date
| dc.contributor.author | Zhang, Quan-Zi | |
| dc.contributor.author | Tinck, Stefan | |
| dc.contributor.author | de Marneffe, Jean-Francois | |
| dc.contributor.author | Zhang, Liping | |
| dc.contributor.author | Bogaerts, Annemie | |
| dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
| dc.contributor.imecauthor | Zhang, Liping | |
| dc.date.accessioned | 2021-10-24T20:00:56Z | |
| dc.date.available | 2021-10-24T20:00:56Z | |
| dc.date.issued | 2017 | |
| dc.identifier.issn | 0003-6951 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30022 | |
| dc.identifier.url | http://aip.scitation.org/doi/abs/10.1063/1.4999439 | |
| dc.source.beginpage | 173104 | |
| dc.source.issue | 17 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 111 | |
| dc.title | Mechanisms for plasma cryogenic etching of porous materials | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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