Publication:

Performance and reliability of HfALOx-based interpoly dielectrics for floating-gate flash memory

Date

2008
Journal article
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dc.contributor.authorGovoreanu, Bogdan
dc.contributor.authorWellekens, Dirk
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorBrunco, David
dc.contributor.authorDe Vos, Joeri
dc.contributor.authorRuiz Aguado, Daniel
dc.contributor.authorBlomme, Pieter
dc.contributor.authorvan der Zanden, Koen
dc.contributor.authorVan Houdt, Jan
dc.contributor.imecauthorGovoreanu, Bogdan
dc.contributor.imecauthorWellekens, Dirk
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorDe Vos, Joeri
dc.contributor.imecauthorBlomme, Pieter
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecDe Vos, Joeri::0000-0002-9332-9336
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.accessioned2021-10-17T07:23:30Z
dc.date.available2021-10-17T07:23:30Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn0038-1101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13803
dc.source.beginpage557
dc.source.endpage563
dc.source.issue4
dc.source.journalSolid-State Electronics
dc.source.volume52
dc.title

Performance and reliability of HfALOx-based interpoly dielectrics for floating-gate flash memory

dc.typeJournal article
dspace.entity.typePublication
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