Publication:

Reversing Hydrogen-Related Loss in α-Ta Thin Films for Quantum Device Fabrication

Date

2025-AUG 11
Journal article
https://doi.org/10.1002/advs.202509244
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dc.contributor.authorLozano, D. P.
dc.contributor.authorMongillo, Massimo
dc.contributor.authorRaes, Bart
dc.contributor.authorCanvel, Yann
dc.contributor.authorMassar, Shana
dc.contributor.authorVadiraj, A. M.
dc.contributor.authorIvanov, Tsvetan
dc.contributor.authorAcharya, Rohith
dc.contributor.authorVan Damme, Jacques
dc.contributor.authorVan de Vondel, Joris
dc.contributor.authorWan, Danny
dc.contributor.authorPotocnik, Anton
dc.contributor.authorDe Greve, K.
dc.contributor.imecauthorLozano, D. P.
dc.contributor.imecauthorMongillo, Massimo
dc.contributor.imecauthorRaes, Bart
dc.contributor.imecauthorCanvel, Yann
dc.contributor.imecauthorMassar, Shana
dc.contributor.imecauthorVadiraj, A. M.
dc.contributor.imecauthorIvanov, Tsvetan
dc.contributor.imecauthorAcharya, Rohith
dc.contributor.imecauthorVan Damme, Jacques
dc.contributor.imecauthorWan, Danny
dc.contributor.imecauthorPotocnik, Anton
dc.contributor.imecauthorDe Greve, K.
dc.contributor.orcidimecMongillo, Massimo::0000-0002-6475-6320
dc.contributor.orcidimecRaes, Bart::0000-0003-0928-0654
dc.contributor.orcidimecCanvel, Yann::0009-0006-7501-9787
dc.contributor.orcidimecMassar, Shana::0000-0002-5329-4677
dc.contributor.orcidimecIvanov, Tsvetan::0000-0003-3407-2742
dc.contributor.orcidimecAcharya, Rohith::0000-0003-3958-6435
dc.contributor.orcidimecVan Damme, Jacques::0000-0002-8938-4383
dc.contributor.orcidimecWan, Danny::0000-0003-4847-3184
dc.contributor.orcidimecPotocnik, Anton::0000-0002-0352-6388
dc.date.accessioned2025-08-18T03:58:57Z
dc.date.available2025-08-18T03:58:57Z
dc.date.issued2025-AUG 11
dc.description.wosFundingTextThe authors gratefully thank Paola Favia, Olivier Richard, Chris Drijbooms, Ilse Hoflijk, Thierry Conard, Celine Noel, Valentina Spampinato, Alexis Franquet, and Ryan Leong for metrology support and Bastiaan Opperdoes for performing the vacuum anneal. This work was supported in part by the imec Industrial Affiliation Program on Quantum Computing. The authors thank L. Swenson, G. Marcaud, and H.-Y. Hsu for insightful comments on this work.
dc.identifier.doi10.1002/advs.202509244
dc.identifier.pmidMEDLINE:40787841
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/46090
dc.publisherWILEY
dc.source.journalADVANCED SCIENCE
dc.source.numberofpages8
dc.title

Reversing Hydrogen-Related Loss in α-Ta Thin Films for Quantum Device Fabrication

dc.typeJournal article
dspace.entity.typePublication
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