Publication:

Reversing Hydrogen-Related Loss in α-Ta Thin Films for Quantum Device Fabrication

Date

2025-AUG 11
Journal article
https://doi.org/10.1002/advs.202509244
Simple item page Full metadata Statistics
 
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-0928-0654
cris.virtual.orcid0000-0003-3098-3266
cris.virtual.orcid0009-0006-7501-9787
cris.virtual.orcid0000-0002-6475-6320
cris.virtual.orcid0000-0003-4847-3184
cris.virtual.orcid0000-0003-3958-6435
cris.virtual.orcid0000-0002-0352-6388
cris.virtual.orcid0000-0002-1314-9715
cris.virtual.orcid0000-0001-8676-5044
cris.virtual.orcid0000-0002-8938-4383
cris.virtual.orcid0000-0002-5329-4677
cris.virtual.orcid0000-0003-3407-2742
cris.virtualsource.department367e3a66-0e80-4ea4-9ace-aaa12d5ae6bf
cris.virtualsource.departmentac970577-14d8-401d-8a09-e2e81baa0fa7
cris.virtualsource.department142233a1-23aa-4920-8aa7-ea5d1b32e137
cris.virtualsource.department137b1147-1d6a-477d-bc17-863690820144
cris.virtualsource.department329bbb00-8c74-412a-8408-2e4297b499d3
cris.virtualsource.departmentc9d2232d-e7c9-4d10-bfc0-661228f94ab6
cris.virtualsource.departmentbe06fd9b-b273-4db8-bcb9-2306e1fd547d
cris.virtualsource.department4f080abc-66ee-4e68-8205-c00721990942
cris.virtualsource.department27a12ccc-7b31-4462-9872-44c7025ae9d2
cris.virtualsource.department07148275-e241-4a1e-bd2e-c042cc244722
cris.virtualsource.department9ae0bb7b-a83f-4c30-ba48-2df94346c0ad
cris.virtualsource.department70ac7f56-1f12-4c30-bf36-971557e3129d
cris.virtualsource.orcid367e3a66-0e80-4ea4-9ace-aaa12d5ae6bf
cris.virtualsource.orcidac970577-14d8-401d-8a09-e2e81baa0fa7
cris.virtualsource.orcid142233a1-23aa-4920-8aa7-ea5d1b32e137
cris.virtualsource.orcid137b1147-1d6a-477d-bc17-863690820144
cris.virtualsource.orcid329bbb00-8c74-412a-8408-2e4297b499d3
cris.virtualsource.orcidc9d2232d-e7c9-4d10-bfc0-661228f94ab6
cris.virtualsource.orcidbe06fd9b-b273-4db8-bcb9-2306e1fd547d
cris.virtualsource.orcid4f080abc-66ee-4e68-8205-c00721990942
cris.virtualsource.orcid27a12ccc-7b31-4462-9872-44c7025ae9d2
cris.virtualsource.orcid07148275-e241-4a1e-bd2e-c042cc244722
cris.virtualsource.orcid9ae0bb7b-a83f-4c30-ba48-2df94346c0ad
cris.virtualsource.orcid70ac7f56-1f12-4c30-bf36-971557e3129d
dc.contributor.authorPerez Lozano, Daniel
dc.contributor.authorMongillo, Massimo
dc.contributor.authorRaes, Bart
dc.contributor.authorCanvel, Yann
dc.contributor.authorMassar, Shana
dc.contributor.authorAnanthapadmanabha Rao, Vadiraj
dc.contributor.authorIvanov, Tsvetan
dc.contributor.authorAcharya, Rohith
dc.contributor.authorVan Damme, Jacques
dc.contributor.authorVan de Vondel, Joris
dc.contributor.authorWan, Danny
dc.contributor.authorPotocnik, Anton
dc.contributor.authorDe Greve, Kristiaan
dc.contributor.imecauthorLozano, D. P.
dc.contributor.imecauthorMongillo, Massimo
dc.contributor.imecauthorRaes, Bart
dc.contributor.imecauthorCanvel, Yann
dc.contributor.imecauthorMassar, Shana
dc.contributor.imecauthorVadiraj, A. M.
dc.contributor.imecauthorIvanov, Tsvetan
dc.contributor.imecauthorAcharya, Rohith
dc.contributor.imecauthorVan Damme, Jacques
dc.contributor.imecauthorWan, Danny
dc.contributor.imecauthorPotocnik, Anton
dc.contributor.imecauthorDe Greve, K.
dc.contributor.orcidimecMongillo, Massimo::0000-0002-6475-6320
dc.contributor.orcidimecRaes, Bart::0000-0003-0928-0654
dc.contributor.orcidimecCanvel, Yann::0009-0006-7501-9787
dc.contributor.orcidimecMassar, Shana::0000-0002-5329-4677
dc.contributor.orcidimecIvanov, Tsvetan::0000-0003-3407-2742
dc.contributor.orcidimecAcharya, Rohith::0000-0003-3958-6435
dc.contributor.orcidimecVan Damme, Jacques::0000-0002-8938-4383
dc.contributor.orcidimecWan, Danny::0000-0003-4847-3184
dc.contributor.orcidimecPotocnik, Anton::0000-0002-0352-6388
dc.date.accessioned2025-08-18T03:58:57Z
dc.date.available2025-08-18T03:58:57Z
dc.date.issued2025-AUG 11
dc.description.wosFundingTextThe authors gratefully thank Paola Favia, Olivier Richard, Chris Drijbooms, Ilse Hoflijk, Thierry Conard, Celine Noel, Valentina Spampinato, Alexis Franquet, and Ryan Leong for metrology support and Bastiaan Opperdoes for performing the vacuum anneal. This work was supported in part by the imec Industrial Affiliation Program on Quantum Computing. The authors thank L. Swenson, G. Marcaud, and H.-Y. Hsu for insightful comments on this work.
dc.identifier.doi10.1002/advs.202509244
dc.identifier.issn2198-3844
dc.identifier.pmidMEDLINE:40787841
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/46090
dc.publisherWILEY
dc.source.beginpagee09244
dc.source.issue39
dc.source.journalADVANCED SCIENCE
dc.source.numberofpages8
dc.source.volume12
dc.title

Reversing Hydrogen-Related Loss in α-Ta Thin Films for Quantum Device Fabrication

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
Advanced Science - 2025 - Lozano - Reversing Hydrogen‐Related Loss in ‐Ta Thin Films for Quantum Device Fabrication.pdf
Size:
1.7 MB
Format:
Adobe Portable Document Format
Description:
Published
Download
Publication available in collections:
Articles