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Laser ablation of SIO2/SINX and ALOX/SINX backside passivation stacks for advanced cell architectures
Publication:
Laser ablation of SIO2/SINX and ALOX/SINX backside passivation stacks for advanced cell architectures
Date
2011
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Jaffrennou, Périne
;
Uruena De Castro, Angel
;
Das, Jo
;
Penaud, Julien
;
Moors, Mathieu
;
Rothschild, Aude
;
Lombardet, Benoit
;
Szlufcik, Jozef
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1
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1911
since deposited on 2021-10-19
Acq. date: 2025-10-25
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Downloads
1
since deposited on 2021-10-19
Acq. date: 2025-10-25
Views
1911
since deposited on 2021-10-19
Acq. date: 2025-10-25
Citations