Electron mean-free path for CNT in vertical interconnects approaches Cu

dc.contributor.author	van der Veen, Marleen
dc.contributor.author	Barbarin, Yohan
dc.contributor.author	Kashiwagi, Yusaku
dc.contributor.author	Tokei, Zsolt
dc.contributor.imecauthor	van der Veen, Marleen
dc.contributor.imecauthor	Tokei, Zsolt
dc.contributor.orcidimec	van der Veen, Marleen::0000-0002-9402-8922
dc.date.accessioned	2021-10-22T07:07:18Z
dc.date.available	2021-10-22T07:07:18Z
dc.date.embargo	9999-12-31
dc.date.issued	2014
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/24683
dc.identifier.url	http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6831865&queryText%3DElectron+mean-free+path+for+CNT+in+vertical+i
dc.source.beginpage	181
dc.source.conference	IEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate	20/05/2014
dc.source.conferencelocation	San Jose, CA USA
dc.source.endpage	184
dc.title	Electron mean-free path for CNT in vertical interconnects approaches Cu
dc.type	Proceedings paper
dspace.entity.type	Publication
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