Publication:
Gas leak rate study of MEMS thin film package in different environments
Date
| dc.contributor.author | Wang, Bo | |
| dc.contributor.author | De Coster, Jeroen | |
| dc.contributor.author | Wevers, Martine | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Wang, Bo | |
| dc.contributor.imecauthor | De Coster, Jeroen | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-22T08:09:35Z | |
| dc.date.available | 2021-10-22T08:09:35Z | |
| dc.date.issued | 2014 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24803 | |
| dc.identifier.url | http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6962722&contentType=Conference+Publications | |
| dc.source.beginpage | 1 | |
| dc.source.conference | 5th Electronics System-Integration Technology Conference - ESTC | |
| dc.source.conferencedate | 16/09/2014 | |
| dc.source.conferencelocation | Helsinki Finland | |
| dc.source.endpage | 4 | |
| dc.title | Gas leak rate study of MEMS thin film package in different environments | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |