Publication:

Improving EUV underlayer coating defectivity using point-of-use filtration

Date

2020
Proceedings Paper
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dc.contributor.authorWu, Aiwen
dc.contributor.authorBayana, Hareen
dc.contributor.authorFoubert, Philippe
dc.contributor.authorChacko, Andrea
dc.contributor.authorGuerrero, Douglas
dc.contributor.imecauthorBayana, Hareen
dc.contributor.imecauthorFoubert, Philippe
dc.contributor.imecauthorGuerrero, Douglas
dc.date.accessioned2021-10-29T08:14:31Z
dc.date.available2021-10-29T08:14:31Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36341
dc.identifier.urlhttps://doi.org/10.1117/12.2551647
dc.source.beginpage113261Z
dc.source.conferenceAdvances in Patterning Materials and Processes XXXVII
dc.source.conferencedate23/02/2020
dc.source.conferencelocationSan José, CA USA
dc.title

Improving EUV underlayer coating defectivity using point-of-use filtration

dc.typeProceedings paper
dspace.entity.typePublication
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