Publication:

Characterization of Sub-micron Metal Line Arrays Using Picosecond Ultrasonics

Date

2020
Proceedings Paper
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dc.contributor.authorMebendale, M.
dc.contributor.authorKotelyanskii, M.
dc.contributor.authorMair, R.
dc.contributor.authorMukundhan, P.
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorTeugels, Lieve
dc.contributor.authorCharley, Anne-Laure
dc.contributor.authorKuszewski, Piotr
dc.contributor.imecauthorBogdanowicz, J.
dc.contributor.imecauthorTeugels, L.
dc.contributor.imecauthorCharley, A. L.
dc.contributor.imecauthorKuszewski, P.
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorCharley, Anne-Laure
dc.contributor.imecauthorKuszewski, Piotr
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.date.accessioned2021-12-08T10:17:19Z
dc.date.available2021-11-02T16:02:22Z
dc.date.available2021-12-08T10:17:19Z
dc.date.issued2020
dc.identifier.eisbn978-1-7281-5876-1
dc.identifier.issn1078-8743
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37980
dc.publisherIEEE
dc.source.conference31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
dc.source.conferencedateAUG 24-26, 2020
dc.source.conferencelocationSaratoga Springs
dc.source.journalna
dc.source.numberofpages6
dc.title

Characterization of Sub-micron Metal Line Arrays Using Picosecond Ultrasonics

dc.typeProceedings paper
dspace.entity.typePublication
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