Publication:
Impact of high-energy particle irradiation on polycrystalline silicon films
Date
| dc.contributor.author | Nakabayashi, M. | |
| dc.contributor.author | Ohyama, Hidenori | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Claeys, C. | |
| dc.contributor.author | Tanaka, K. | |
| dc.contributor.author | Kobayashi, K. | |
| dc.contributor.author | Miyahara, K. | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-14T17:24:49Z | |
| dc.date.available | 2021-10-14T17:24:49Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5506 | |
| dc.source.beginpage | 471 | |
| dc.source.conference | GADEST 2001 - Proceedings of the 9th International Autumn Meeting Gettering and Defect Engineering in Semiconductor Technology; | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 476 | |
| dc.title | Impact of high-energy particle irradiation on polycrystalline silicon films | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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