Publication:
Stimulated buried dielectric phase formation for nanelectronic aims
Date
| dc.contributor.author | Litovchenko, V. G. | |
| dc.contributor.author | Romanyuk, B. N. | |
| dc.contributor.author | Efremov, A. A. | |
| dc.contributor.author | Mel'nik, V. P. | |
| dc.contributor.author | Claeys, Cor | |
| dc.date.accessioned | 2021-09-30T09:17:19Z | |
| dc.date.available | 2021-09-30T09:17:19Z | |
| dc.date.issued | 1997 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2001 | |
| dc.source.beginpage | 81 | |
| dc.source.conference | Proceedings of the 8th International Symposium on Silicon-on-Insulator Technology and Devices | |
| dc.source.conferencedate | 31/08/1997 | |
| dc.source.conferencelocation | Paris France | |
| dc.source.endpage | 85 | |
| dc.title | Stimulated buried dielectric phase formation for nanelectronic aims | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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