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Atomic layer deposition of high-k dielectric layers on single-walled carbon nanotubes

Date

2012
Meeting abstract
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dc.contributor.authorCott, Daire
dc.contributor.authorLiyanage, Luckshitha
dc.contributor.authorDelabie, Annelies
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorWong, Hon- Sum Philip
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-20T10:24:08Z
dc.date.available2021-10-20T10:24:08Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20502
dc.source.beginpageE1.5
dc.source.conferenceNew Diamond and Nano Carbons Conference - NDNC
dc.source.conferencedate21/05/2012
dc.source.conferencelocationSan Juan Puerto Rico
dc.title

Atomic layer deposition of high-k dielectric layers on single-walled carbon nanotubes

dc.typeMeeting abstract
dspace.entity.typePublication
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