Publication:
A Novel Volatile Film for Dielectric Plasma Damage Protection
Date
| dc.contributor.author | de Marneffe, Jean-Francois | |
| dc.contributor.author | Rezvanov, Askar | |
| dc.contributor.author | Chanson, Romain | |
| dc.contributor.author | Babaei Gavan, Khashayar | |
| dc.contributor.author | Fujikawa, M. | |
| dc.contributor.author | Yamaguchi, T. | |
| dc.contributor.author | Nozawa, S. | |
| dc.contributor.author | Kikuchi, Y. | |
| dc.contributor.author | Maekawa, K. | |
| dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
| dc.contributor.imecauthor | Babaei Gavan, Khashayar | |
| dc.date.accessioned | 2021-10-27T08:25:51Z | |
| dc.date.available | 2021-10-27T08:25:51Z | |
| dc.date.issued | 2019 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/32806 | |
| dc.identifier.url | http://pesm2019.insight-outside.fr/ | |
| dc.source.conference | Plasma Etch and Strip in Microtechnology Workshop - PESM | |
| dc.source.conferencedate | 20/05/2019 | |
| dc.source.conferencelocation | Grenoble France | |
| dc.title | A Novel Volatile Film for Dielectric Plasma Damage Protection | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |