Publication:
Wet cleaning/etching in nanoconfined spaces
Date
| dc.contributor.author | Vereecke, Guy | |
| dc.contributor.imecauthor | Vereecke, Guy | |
| dc.contributor.orcidimec | Vereecke, Guy::0000-0001-9058-9338 | |
| dc.date.accessioned | 2021-10-29T07:10:57Z | |
| dc.date.available | 2021-10-29T07:10:57Z | |
| dc.date.issued | 2020 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/36244 | |
| dc.source.conference | 31th Surface Cleaning Users Group Meeting, Hanyang University ERICA | |
| dc.source.conferencedate | 22/10/2020 | |
| dc.source.conferencelocation | Seoul South Korea | |
| dc.title | Wet cleaning/etching in nanoconfined spaces | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |