Publication:
A novel gap narrowing process for creating high aspect ratio transduction gaps for MEM HF resonators
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1979 since deposited on 2021-10-17
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Acq. date: 2026-04-26
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Statistics
Views
1979 since deposited on 2021-10-17
3last month
1last week
Acq. date: 2026-04-26
Citations