Removal of nano-particles by aerosol spray: effect of droplet size and velocity on cleaning performance

dc.contributor.author	Xu, Kaidong
dc.contributor.author	Pichler, Stefan
dc.contributor.author	Wostyn, Kurt
dc.contributor.author	Cado, Gwenaelle
dc.contributor.author	Gale, Glenn
dc.contributor.author	Dalmer, Michael
dc.contributor.author	Springer, Clement
dc.contributor.author	Mertens, Paul
dc.contributor.author	Bearda, Twan
dc.contributor.author	Gaulhofer, Ernst
dc.contributor.author	Chen, David
dc.contributor.imecauthor	Wostyn, Kurt
dc.contributor.imecauthor	Mertens, Paul
dc.contributor.orcidimec	Wostyn, Kurt::0000-0003-3995-0292
dc.date.accessioned	2021-10-17T12:55:47Z
dc.date.available	2021-10-17T12:55:47Z
dc.date.issued	2008
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/14807
dc.source.conference	9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS
dc.source.conferencedate	21/09/2008
dc.source.conferencelocation	Bruges Belgium
dc.title	Removal of nano-particles by aerosol spray: effect of droplet size and velocity on cleaning performance
dc.type	Oral presentation
dspace.entity.type	Publication
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