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Pre-amorphization and co-implantation suitability for advanced PMOS devices integration
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Pre-amorphization and co-implantation suitability for advanced PMOS devices integration
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Date
2003
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Surdeanu, Radu
;
Pawlak, Bartek
;
Lindsay, Richard
;
Van Dal, Mark
;
Doornbos, Gerben
;
Dachs, Charles
;
Ponomarev, Youri
;
Loo, Josine
;
Henson, Kirklen
;
Verheijen, M.
;
Kaiser, M.
;
Pagès, Xavier
;
Jurczak, Gosia
;
Stolk, Peter
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1975
since deposited on 2021-10-15
Acq. date: 2026-01-11
Citations
Metrics
Views
1975
since deposited on 2021-10-15
Acq. date: 2026-01-11
Citations