Publication:
BARC process optimatization for hyper NA tools and influence of polarization on CD swing and standing waves
Date
| dc.contributor.author | Op de Beeck, Maaike | |
| dc.contributor.author | Hermans, Jan | |
| dc.contributor.author | Foubert, Philippe | |
| dc.contributor.author | Wiaux, Vincent | |
| dc.contributor.author | Hendrickx, Eric | |
| dc.contributor.imecauthor | Op de Beeck, Maaike | |
| dc.contributor.imecauthor | Hermans, Jan | |
| dc.contributor.imecauthor | Foubert, Philippe | |
| dc.contributor.imecauthor | Wiaux, Vincent | |
| dc.contributor.imecauthor | Hendrickx, Eric | |
| dc.contributor.orcidimec | Op de Beeck, Maaike::0000-0002-2700-6432 | |
| dc.contributor.orcidimec | Hermans, Jan::0000-0003-1249-8902 | |
| dc.date.accessioned | 2021-10-16T03:48:00Z | |
| dc.date.available | 2021-10-16T03:48:00Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10961 | |
| dc.source.conference | 2nd International Symposium on Immersion Lithography | |
| dc.source.conferencedate | 12/09/2005 | |
| dc.source.conferencelocation | Brugge Belgium | |
| dc.title | BARC process optimatization for hyper NA tools and influence of polarization on CD swing and standing waves | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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