Publication:
The rinsing problem: effect of solute-surface interactions on wafer purity
Date
| dc.contributor.author | Loewenstein, Lee | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.date.accessioned | 2021-10-01T08:29:11Z | |
| dc.date.available | 2021-10-01T08:29:11Z | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2738 | |
| dc.source.conference | 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS | |
| dc.source.conferencedate | 21/09/1998 | |
| dc.source.conferencelocation | Oostende Belgium | |
| dc.title | The rinsing problem: effect of solute-surface interactions on wafer purity | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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