Publication:
Method to assess the impact of LER and spacing variation on BEOL dielectric reliability using 2D-field simulations for <20nm spacing
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1858 since deposited on 2021-10-25
2last month
Acq. date: 2025-12-12
Citations
Metrics
Views
1858 since deposited on 2021-10-25
2last month
Acq. date: 2025-12-12
Citations