Publication:
Method to assess the impact of LER and spacing variation on BEOL dielectric reliability using 2D-field simulations for <20nm spacing
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1859 since deposited on 2021-10-25
1last month
Acq. date: 2026-01-09
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Metrics
Views
1859 since deposited on 2021-10-25
1last month
Acq. date: 2026-01-09
Citations