Publication:
Compact thermally actuated latching MEMS switch with large contact force
Date
| dc.contributor.author | Dellaert, Dries | |
| dc.contributor.author | Doutreloigne, Jan | |
| dc.contributor.imecauthor | Doutreloigne, Jan | |
| dc.date.accessioned | 2021-10-22T18:58:09Z | |
| dc.date.available | 2021-10-22T18:58:09Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2015 | |
| dc.identifier.issn | 0013-5194 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25185 | |
| dc.identifier.url | http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7006862 | |
| dc.source.beginpage | 80 | |
| dc.source.endpage | 81 | |
| dc.source.issue | 1 | |
| dc.source.journal | Electronics Letters | |
| dc.source.volume | 51 | |
| dc.title | Compact thermally actuated latching MEMS switch with large contact force | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |