Publication:
Total reflection X-ray fluorescence spectrometry for the introduction of novel materials in clean room production environments
Date
| dc.contributor.author | Hellin, David | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | Rip, Jens | |
| dc.contributor.author | Vinckier, Chris | |
| dc.contributor.imecauthor | Hellin, David | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.imecauthor | Rip, Jens | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.date.accessioned | 2021-10-16T01:57:38Z | |
| dc.date.available | 2021-10-16T01:57:38Z | |
| dc.date.issued | 2005-12 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10561 | |
| dc.source.beginpage | 639 | |
| dc.source.endpage | 651 | |
| dc.source.issue | 4 | |
| dc.source.journal | IEEE Trans. Device and Materials Reliability | |
| dc.source.volume | 5 | |
| dc.title | Total reflection X-ray fluorescence spectrometry for the introduction of novel materials in clean room production environments | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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