Publication:
Transient sputter yields, build-up of the altered layer and Ge-segregation as a function of the O2+ ion-fluence in SiGe
Date
| dc.contributor.author | Huyghebaert, Cedric | |
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Janssens, Tom | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Huyghebaert, Cedric | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Huyghebaert, Cedric::0000-0001-6043-7130 | |
| dc.date.accessioned | 2021-10-15T04:57:45Z | |
| dc.date.available | 2021-10-15T04:57:45Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7669 | |
| dc.source.beginpage | 56 | |
| dc.source.endpage | 61 | |
| dc.source.journal | Applied Surface Science | |
| dc.source.volume | 203-204 | |
| dc.title | Transient sputter yields, build-up of the altered layer and Ge-segregation as a function of the O2+ ion-fluence in SiGe | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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