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Evaluation of stress reduction in shallow trench isolation CMOS structures via synchrotron X-ray topography, Raman spectroscopy and electrical data
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1915 since deposited on 2021-10-01
Acq. date: 2026-01-25
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Statistics
Views
1915 since deposited on 2021-10-01
Acq. date: 2026-01-25
Citations