Publication:
Area-selective deposition by a combination of organic film passivation and atomic layer deposition
Date
| dc.contributor.author | Pasquali, Mattia | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | Armini, Silvia | |
| dc.contributor.imecauthor | Pasquali, Mattia | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.imecauthor | Armini, Silvia | |
| dc.contributor.orcidimec | Pasquali, Mattia::0000-0002-1309-1082 | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
| dc.date.accessioned | 2021-10-27T15:35:25Z | |
| dc.date.available | 2021-10-27T15:35:25Z | |
| dc.date.issued | 2019 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/33751 | |
| dc.identifier.url | http://ma.ecsdl.org/content/MA2019-02/24/1136.abstract | |
| dc.source.beginpage | 1136 | |
| dc.source.conference | Atomic Layer Deposition Applications 15 | |
| dc.source.conferencedate | 13/10/2019 | |
| dc.source.conferencelocation | Atlanta, GA USA | |
| dc.title | Area-selective deposition by a combination of organic film passivation and atomic layer deposition | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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