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Optimisation of a plasma scrubber in the exhaust stream of a W-CVD tool
Publication:
Optimisation of a plasma scrubber in the exhaust stream of a W-CVD tool
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Date
1999
Proceedings Paper
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3901.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Hoornick, Nausikaa
;
Van Hoeymissen, Jan
;
Heyns, Marc
Journal
Abstract
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1896
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Acq. date: 2025-12-15
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Metrics
Views
1896
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-15
Citations