Publication:

Optimization of etching and stripping chemistries for Z3MS TM low-k

Date

2001

Proceedings Paper

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Author(s)

;

Shamiryan, Denis

;

Baklanov, Mikhaïl

;

Struyf, Herbert

;

Mannaert, Geert

;

Vanhaelemeersch, Serge

;

;

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1993 since deposited on 2021-10-14

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Acq. date: 2026-04-07