Publication:

Benchmarking SOI and bulk FinFET alternatives for PLANAR CMOS scaling succession

Date

2010
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorChiarella, Thomas
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorKerner, Christoph
dc.contributor.authorRakowski, Michal
dc.contributor.authorOrtolland, Claude
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorParvais, Bertrand
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorKubicek, Stefan
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorVrancken, Christa
dc.contributor.authorBrus, Stephan
dc.contributor.authorLauwers, Anne
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBiesemans, Serge
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorKerner, Christoph
dc.contributor.imecauthorRakowski, Michal
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorParvais, Bertrand
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecParvais, Bertrand::0000-0003-0769-7069
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.date.accessioned2021-10-18T15:33:58Z
dc.date.available2021-10-18T15:33:58Z
dc.date.issued2010
dc.identifier.issn0038-1101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16858
dc.identifier.urlhttp://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TY5-5045DW2-2&_user=799533&_coverDate=05%2F20%2F2010&_rdoc=1&_fmt=hig
dc.source.beginpage855
dc.source.endpage860
dc.source.issue9
dc.source.journalSolid-State Electronics
dc.source.volume54
dc.title

Benchmarking SOI and bulk FinFET alternatives for PLANAR CMOS scaling succession

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles