Publication:
Stiction-free poly-SiGe resonant biosensors for monolithic integration with CMOS
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1876 since deposited on 2021-10-19
Acq. date: 2025-12-12
Citations
Metrics
Views
1876 since deposited on 2021-10-19
Acq. date: 2025-12-12
Citations