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Influence of the tip field, laser, pole and zone lines on the quantification of GaN/AlGaN heterostructures

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dc.contributor.authorMorris, Richard
dc.contributor.authorCuduvally, Ramya
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorZhao, Ming
dc.contributor.authorvan der Heide, Paul
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorCuduvally, Ramya
dc.contributor.imecauthorZhao, Ming
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.contributor.orcidimecZhao, Ming::0000-0002-0856-851X
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.date.accessioned2021-10-25T23:45:37Z
dc.date.available2021-10-25T23:45:37Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31375
dc.source.conferenceAtom Probe Tomography and Microscopy - APT&M
dc.source.conferencedate10/06/2018
dc.source.conferencelocationGaithersburg, MD USA
dc.title

Influence of the tip field, laser, pole and zone lines on the quantification of GaN/AlGaN heterostructures

dc.typeProceedings paper
dspace.entity.typePublication
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