Publication:

Diffractive micro-electromechanical structures in Si and SiGe

Date

2013-08
Dissertation
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dc.contributor.authorRudra, Sukumar
dc.contributor.thesisadvisorVan Thourhout, Dries
dc.date.accessioned2021-10-21T11:36:06Z
dc.date.available2021-10-21T11:36:06Z
dc.date.embargo9999-12-31
dc.date.issued2013-08
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23022
dc.title

Diffractive micro-electromechanical structures in Si and SiGe

dc.typePHD thesis
dspace.entity.typePublication
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