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Study of interfacial reactions and phase stabilization of mixed Sc, Dy, Hf high-k oxides by attenuated total reflectance infrared spectroscopy

Date

2009
Journal article
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dc.contributor.authorHardy, An
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorVan den Rul, Heidi
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.authorKittl, Jorge
dc.contributor.authorMullens, Jan
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-17T22:43:07Z
dc.date.available2021-10-17T22:43:07Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15435
dc.source.beginpage7812
dc.source.endpage7817
dc.source.issue17
dc.source.journalApplied Surface Science
dc.source.volume255
dc.title

Study of interfacial reactions and phase stabilization of mixed Sc, Dy, Hf high-k oxides by attenuated total reflectance infrared spectroscopy

dc.typeJournal article
dspace.entity.typePublication
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