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Implementation of the system of experiment design and taboo search into SiON thin film technology

Date

2000
Presentation
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dc.contributor.authorPopov, I.
dc.contributor.authorVan Calster, Andre
dc.contributor.authorDe Baets, Johan
dc.contributor.authorDe Pauw, Herbert
dc.contributor.imecauthorVan Calster, Andre
dc.contributor.imecauthorDe Baets, Johan
dc.contributor.imecauthorDe Pauw, Herbert
dc.date.accessioned2021-10-14T13:35:33Z
dc.date.available2021-10-14T13:35:33Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4670
dc.source.conference3rd SIAM Conference on Mathematical Aspects of Materials Science; May 2000; Philadelphia, PA, USA.
dc.source.conferencelocation
dc.title

Implementation of the system of experiment design and taboo search into SiON thin film technology

dc.typeOral presentation
dspace.entity.typePublication
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