Publication:

Integration of CNT/Cu hybrid interconnects for BEOL: new possibilities for ECD

Date

2009
Meeting abstract
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Author(s)

Vereecken, Philippe  
;
Chiodarelli, Nicolo
;
Romo Negreira, Ainhoa  
;
Santini, Claudia
;
Peys, Nick
;
Cott, Daire  
;
van der Veen, Marleen  
;
Verhulst, Anne  
;
Arstila, Kai
;
Groeseneken, Guido  
;
Heyns, Marc  
;
De Gendt, Stefan  

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