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Integration of CNT/Cu hybrid interconnects for BEOL: new possibilities for ECD
Publication:
Integration of CNT/Cu hybrid interconnects for BEOL: new possibilities for ECD
Date
2009
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vereecken, Philippe
;
Chiodarelli, Nicolo
;
Romo Negreira, Ainhoa
;
Santini, Claudia
;
Peys, Nick
;
Cott, Daire
;
van der Veen, Marleen
;
Verhulst, Anne
;
Arstila, Kai
;
Groeseneken, Guido
;
Heyns, Marc
;
De Gendt, Stefan
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Abstract
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1901
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Citations
Metrics
Views
1901
since deposited on 2021-10-18
421
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations