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Charging and discharging phenomena in electrostatically-driven single-crystal-silicon MEM resonators: DC bias dependence and influence on the series resonance frequency

Date

2008
Journal article
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dc.contributor.authorKalicinski, Stanislaw
dc.contributor.authorWevers, Martine
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-17T07:56:10Z
dc.date.available2021-10-17T07:56:10Z
dc.date.issued2008
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13937
dc.source.beginpage1221
dc.source.endpage1226
dc.source.issue8_9
dc.source.journalMicroelectronics Reliability
dc.source.volume48
dc.title

Charging and discharging phenomena in electrostatically-driven single-crystal-silicon MEM resonators: DC bias dependence and influence on the series resonance frequency

dc.typeJournal article
dspace.entity.typePublication
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