Publication:

Super secondary grain growth in the barrier/seedlayer system

Date

2004
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dc.contributor.authorVanstreels, Kris
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorDemuynck, Steven
dc.contributor.authorD'Haen, Jan
dc.contributor.authorDe Ceuninck, Ward
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorDe Ceuninck, Ward
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.date.accessioned2021-10-15T17:28:29Z
dc.date.available2021-10-15T17:28:29Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9836
dc.source.conferenceAdvanced Metallization Conference
dc.source.conferencedate19/10/2004
dc.source.conferencelocationSan Diego, CA USA
dc.title

Super secondary grain growth in the barrier/seedlayer system

dc.typeOral presentation
dspace.entity.typePublication
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