Publication:

Ion beam synthesis of heteroepitaxial erbium silicide layers

Date

1996
Journal article
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dc.contributor.authorWu, Ming Fang
dc.contributor.authorVantomme, Andre
dc.contributor.authorPattyn, H.
dc.contributor.authorLangouche, G.
dc.contributor.authorBender, Hugo
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorBender, Hugo
dc.date.accessioned2021-09-29T15:55:05Z
dc.date.available2021-09-29T15:55:05Z
dc.date.embargo9999-12-31
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1667
dc.source.beginpage184
dc.source.endpage188
dc.source.journalApplied Surface Science
dc.source.volume102
dc.title

Ion beam synthesis of heteroepitaxial erbium silicide layers

dc.typeJournal article
dspace.entity.typePublication
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