Publication:
Spinel IGZO deposition on optimized GZO templates
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| cris.virtual.orcid | 0000-0003-0557-5260 | |
| cris.virtual.orcid | 0000-0003-4778-5709 | |
| cris.virtual.orcid | 0000-0002-3947-1948 | |
| cris.virtual.orcid | 0000-0002-2108-4800 | |
| cris.virtual.orcid | 0000-0002-1439-590X | |
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| cris.virtualsource.orcid | fe4e12ec-2492-48d4-ba6d-9d4db340b247 | |
| dc.contributor.author | Dekkers, Harold | |
| dc.contributor.author | Dialameh, Masoud | |
| dc.contributor.author | Agati, Marta | |
| dc.contributor.author | van Setten, Michiel | |
| dc.contributor.author | Belmonte, Attilio | |
| dc.contributor.imecauthor | Dekkers, Hendrik F. W. | |
| dc.contributor.imecauthor | Dialameh, Masoud | |
| dc.contributor.imecauthor | Agati, Marta | |
| dc.contributor.imecauthor | van Setten, Michiel J. | |
| dc.contributor.imecauthor | Belmonte, Attilio | |
| dc.contributor.orcidimec | Dialameh, Masoud::0000-0002-1439-590X | |
| dc.contributor.orcidimec | Agati, Marta::0000-0002-2108-4800 | |
| dc.contributor.orcidimec | Belmonte, Attilio::0000-0002-3947-1948 | |
| dc.date.accessioned | 2025-04-19T05:30:45Z | |
| dc.date.available | 2025-04-19T05:30:45Z | |
| dc.date.issued | 2025-APR | |
| dc.description.wosFundingText | This work has been enabled in part by the NanoIC pilot line. The acquisition and operation are jointly funded by the Chips Joint Undertaking, through the European Union's Digital Europe (101183266) and Horizon Europe programs (101183277), as well as by the participating states Belgium (Flanders), France, Germany, Finland, Ireland and Romania. | |
| dc.identifier.doi | 10.1007/s10854-025-14637-x | |
| dc.identifier.issn | 0957-4522 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45545 | |
| dc.publisher | SPRINGER | |
| dc.source.issue | 10 | |
| dc.source.journal | JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS | |
| dc.source.numberofpages | 19 | |
| dc.source.volume | 36 | |
| dc.subject.keywords | GA-ZN-O | |
| dc.subject.keywords | OXIDE-SEMICONDUCTOR | |
| dc.subject.keywords | ELECTRONIC-STRUCTURE | |
| dc.subject.keywords | THIN-FILM | |
| dc.subject.keywords | ELECTRICAL-CONDUCTIVITY | |
| dc.subject.keywords | HIGH-MOBILITY | |
| dc.subject.keywords | DEFECTS | |
| dc.subject.keywords | INGAO3(ZNO)(5) | |
| dc.subject.keywords | MECHANISM | |
| dc.subject.keywords | TRANSPORT | |
| dc.title | Spinel IGZO deposition on optimized GZO templates | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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