Publication:

Growth and physical properties of MOCVD-deposited hafnium oxide films and their properties on silicon

Date

2003

Proceedings Paper

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Files

7230.pdf 389.05 KB

Author(s)

Van Elshocht, Sven

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;

De Gendt, Stefan

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Conard, Thierry

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;

;

Witters, Thomas

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;

;

Richard, Olivier

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;

Vandervorst, Wilfried

;

Carter, Richard

;

;

;

;

Statistics

1 since deposited on 2021-10-15

Acq. date: 2026-02-24

1949 since deposited on 2021-10-15

Acq. date: 2026-02-24