Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
High velocity aerosol cleaning with organic solvents: particle removal and substrate damage
Publication:
High velocity aerosol cleaning with organic solvents: particle removal and substrate damage
Date
2009
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Andreas, Michael
;
Wostyn, Kurt
;
Wada, Masayuki
;
Janssens, Tom
;
Kenis, Karine
;
Bearda, Twan
;
Mertens, Paul
Journal
Solid State Phenomena
Abstract
Description
Metrics
Views
1967
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1967
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations