Publication:

Extended defects created by light ion implantation in Germanium

Date

2008
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorDavid, M.L.
dc.contributor.authorBarbot, J.F.
dc.contributor.authorRousselet, S.
dc.contributor.authorPailloux, F.
dc.contributor.authorBabonneau, D.
dc.contributor.authorBeaufort, M.F.
dc.contributor.authorPizzagali, L.
dc.contributor.authorDrouet, M.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-17T06:41:59Z
dc.date.available2021-10-17T06:41:59Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13587
dc.source.beginpage163
dc.source.conferenceHigh Purity Silicon 10
dc.source.conferencedate12/10/2008
dc.source.conferencelocationHonolulu, HI USA
dc.source.endpage175
dc.title

Extended defects created by light ion implantation in Germanium

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
17768.pdf
Size:
701.98 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions