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Etch of Yb-doped poly gates to achieve low vt Ni-FUSI CMOS
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Etch of Yb-doped poly gates to achieve low vt Ni-FUSI CMOS
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Date
2007
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Demand, Marc
;
Paraschiv, Vasile
;
Shamiryan, Denis
;
Veloso, Anabela
;
Vrancken, Christa
;
Brus, Stephan
;
Boullart, Werner
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1786
since deposited on 2021-10-16
1
last month
Acq. date: 2025-12-16
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Metrics
Views
1786
since deposited on 2021-10-16
1
last month
Acq. date: 2025-12-16
Citations