Publication:
Surface-dependent adsorption and diffusion processes in area-selective deposition of ruthenium
Date
| dc.contributor.author | Soethoudt, Job | |
| dc.contributor.imecauthor | Soethoudt, Job | |
| dc.contributor.thesisadvisor | Delabie, Annelies | |
| dc.date.accessioned | 2021-10-29T04:31:01Z | |
| dc.date.available | 2021-10-29T04:31:01Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2020-03 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/35985 | |
| dc.title | Surface-dependent adsorption and diffusion processes in area-selective deposition of ruthenium | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |