Publication:

Novel cost-effective approach to produce nano-sized contact openings in an aluminum oxide passivation layer up to 30 nm thick for CIGS solar cells

Date

2021
Journal article
https://doi.org/10.1088/1361-6463/abed09
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dc.contributor.authorKandybka, Iryna
dc.contributor.authorBirant, Gizem
dc.contributor.authorde Wild, Jessica
dc.contributor.authorBuldu, Dilara Gokcen
dc.contributor.authorKohl, Thierry
dc.contributor.authorThiruvallur Eachambadi, Ragha
dc.contributor.authorBrammertz, Guy
dc.contributor.authorManca, Jean, V
dc.contributor.authorMeuris, Marc
dc.contributor.authorPoortmans, Jef
dc.contributor.authorVermang, Bart
dc.contributor.imecauthorKandybka, Iryna
dc.contributor.imecauthorBirant, Gizem
dc.contributor.imecauthorde Wild, Jessica
dc.contributor.imecauthorBuldu, Dilara Gokcen
dc.contributor.imecauthorKohl, Thierry
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorVermang, Bart
dc.contributor.orcidextThiruvallur Eachambadi, Ragha::0000-0002-2460-8577
dc.contributor.orcidextManca, Jean, V::0000-0002-3290-0308
dc.contributor.orcidimecBirant, Gizem::0000-0003-0496-8150
dc.contributor.orcidimecBuldu, Dilara Gokcen::0000-0003-0660-043X
dc.contributor.orcidimecKohl, Thierry::0000-0002-8232-0598
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.contributor.orcidimecde Wild, Jessica::0000-0003-2291-4674
dc.contributor.orcidimecKohl, Thierry::4321-4321-4321-4321
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.contributor.orcidimecVermang, Bart::0000-0003-2669-2087
dc.date.accessioned2022-02-23T09:02:55Z
dc.date.available2022-02-23T09:02:55Z
dc.date.issued2021
dc.identifier.doi10.1088/1361-6463/abed09
dc.identifier.issn0022-3727
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39031
dc.publisherIOP Publishing Ltd
dc.source.beginpage234004
dc.source.issue23
dc.source.journalJOURNAL OF PHYSICS D-APPLIED PHYSICS
dc.source.numberofpages8
dc.source.volume54
dc.subject.keywordsREAR SURFACE PASSIVATION
dc.subject.keywordsEFFICIENCY
dc.subject.keywordsCU(IN
dc.title

Novel cost-effective approach to produce nano-sized contact openings in an aluminum oxide passivation layer up to 30 nm thick for CIGS solar cells

dc.typeJournal article
dspace.entity.typePublication
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