Publication:
Self assembled airgap structures
Date
| dc.contributor.author | Gueneau de Mussy, Jean Paul | |
| dc.contributor.author | Beyer, Gerald | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Beyer, Gerald | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-15T13:40:40Z | |
| dc.date.available | 2021-10-15T13:40:40Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8988 | |
| dc.source.conference | Workshop on Materials for Advanced Metallization - MAM | |
| dc.source.conferencedate | 7/03/2004 | |
| dc.source.conferencelocation | Brussels Belgium | |
| dc.title | Self assembled airgap structures | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |